Plasma-resistant perfluoro elastomer
TOMBO™ No. 2670-PFW
Rubber O-ring Perfluoro PFW
It has excellent plasma resistance and is used in dry etching equipment to manufacture semiconductors.
Product Category
Elastomer ProductsHigh-Performance Elastomer
Industry
ElectronicsSemiconductors & Flat Panel Displays (FPD)Electronic Components
Forte
Standard hardness (Duro A): 70
It experiences little weight reduction when exposed to plasma and has excellent plasma resistance.
*The guide for heat resistance differs according to various conditions.
Application
Other
- TOMBO is a registered trademark or trademark of NICHIAS Corporation.
- Name of products with "®" are registered trademarks of NICHIAS Corporation.
- Name of products with "™" are trademarks of NICHIAS Corporation.
Download Catalogs
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